Lexington, MA - Performance Motion Devices’ MC1401A Motion Processor for Brushed Servo Motion Control has been selected by Eaton Corporation’s Implant Systems Division for two of its newest controllers used to automate wafer handling during the semiconductor manufacturing process. Eaton’s primary requirements were quick and precise handling of delicate silicon wafers in their medium and high current ion implanters. PMD’s motion processor, offering benefits such as size, performance and cost, enabled Eaton to achieve higher throughput.
Eaton has integrated PMD’s MC1401A into a small, general purpose, three axis motion controller, called the Micro3, for use in their 300mm medium current ion implanters. The motion controller is designed to control low current DC brush type motors and all of the associated sensors and actuators. The controller was developed to improve reliability while reducing both cost and size. Micro3 will be used on Eaton’s newest 300mm medium current implanter, the MC3, in several different applications including a wafer aligner and energy analysis slit controller, transfer arm, load lock and extraction manipulator controllers. Eaton is also using PMD’s MC1401A for their next generation dose controller. This controller monitors and controls the amount of dopant (dose) applied to the wafer.
The MC1401A Motion Processor is an intelligent, programmable chipset available in a 1, 2, or 4 axis configuration that performs complete motion sequences such as "move to a point at this velocity and acceleration" or "maintain position using PID control." It consists of a processor for profile and PID calculations and a logic device to handle motor specific functions such as encoder feedback.
The ability to generate smooth trajectories was a significant requirement of Eaton’s motion controller. Mike Harris, Line Product Manager commented, "PMD’s MC1401A Motion Processor was selected primarily for its S-curve motion profile capability. Previous generation controllers were limited to trapezoidal moves, which can put increased stress on the load or the drive mechanism, resulting in vibration. By using S-curve profiles, the cycle time of certain moves was reduced by as much as 20% in Eaton’s application." The motion processor enables tighter positioning control throughout the move profile and improved positioning accuracy at the profile destination. Both capabilities are critical in improving throughput and performance.
Eaton chose the MC1401A after investigating other alternative solutions, such as single axis chips and off-the-shelf motion cards. These alternatives could not meet the criteria established by Eaton for the controller. Mike commented that "The high integration and PWM interface of the PMD chipset helped Eaton reach these goals by enabling a significant component count reduction over previous designs. The MC1401A Motion Processor, three LMD18200T amplifier chips and three 26LS32 line-driver receivers make up the entire motion control section of the controller."
